JPH08128Y2 - 両面研磨機 - Google Patents
両面研磨機Info
- Publication number
- JPH08128Y2 JPH08128Y2 JP1989037186U JP3718689U JPH08128Y2 JP H08128 Y2 JPH08128 Y2 JP H08128Y2 JP 1989037186 U JP1989037186 U JP 1989037186U JP 3718689 U JP3718689 U JP 3718689U JP H08128 Y2 JPH08128 Y2 JP H08128Y2
- Authority
- JP
- Japan
- Prior art keywords
- roller
- carrier
- teeth
- double
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005498 polishing Methods 0.000 title claims description 32
- 239000003795 chemical substances by application Substances 0.000 description 10
- 230000000694 effects Effects 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 230000009545 invasion Effects 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 239000000969 carrier Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989037186U JPH08128Y2 (ja) | 1989-03-30 | 1989-03-30 | 両面研磨機 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989037186U JPH08128Y2 (ja) | 1989-03-30 | 1989-03-30 | 両面研磨機 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02130748U JPH02130748U (en]) | 1990-10-29 |
JPH08128Y2 true JPH08128Y2 (ja) | 1996-01-10 |
Family
ID=31544071
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989037186U Expired - Lifetime JPH08128Y2 (ja) | 1989-03-30 | 1989-03-30 | 両面研磨機 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH08128Y2 (en]) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4663270B2 (ja) * | 2004-08-04 | 2011-04-06 | 不二越機械工業株式会社 | 研磨装置 |
JP4510659B2 (ja) * | 2005-02-04 | 2010-07-28 | 不二越機械工業株式会社 | 研磨装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5997855U (ja) * | 1982-12-21 | 1984-07-03 | 住友電気工業株式会社 | 両面同時ラツプ研磨機 |
JPH0525809Y2 (en]) * | 1986-11-06 | 1993-06-29 |
-
1989
- 1989-03-30 JP JP1989037186U patent/JPH08128Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH02130748U (en]) | 1990-10-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |